Carnegie Mellon University

Micro and Nano Systems Laboratory

College of Engineering

Piezoelectric Resonators for 5G communication

A key component of wireless communication is filtering radio frequency signals after they are received by an antenna. This is achieved by using a MEMS devices made out of piezoelectric materials. Trends in 5G communication require resonators with higher frequency of operation, stronger piezoelectric coupling, and lower loss. We investigate new piezoelectric materials such as Lithium Niobate and Scandium doped Aluminum Nitride, novel resonator designs, and external stimulation to tuning resonator properties during operation.