PMaNS Laboratory

In the MEMS Laboratory, we are developing miniature sensor and actuator systems made using batch-fabrication processes, especially integrated-circuit fabrication processes. Research in this area is motivated by the potential to produce high-performance, low-cost, miniature sensors and actuators. Smart sensors are made by combining microstructures and circuits on a single silicon chip. Specific research areas of interest include nanometer-scale data storage, microsensors and microactuators, MEMS design tools, micromechanical component modeling, embedded microinstruments, and microrobotics.