Dektak 3 Profiler
Description
The Dektak 3 Surface Profilometer is an instrument to measure the vertical profile of samples, thin film thickness, and other topographical features, such as film roughness or wafer bowing.
A diamond stylus is moved vertically into in contact with the sample and then moved laterally across the sample for a specified distance and specified contact force. The instrument can measure small surface variations in vertical stylus displacement as a function of position. The Dektak profilometer can measure small vertical features ranging in height from 100 Å to 650,000 Å on a 5" Diameter Sample Stage. The height position of the diamond stylus generates an analog signal which is converted into a digital signal stored, analyzed and displayed. The radius of diamond stylus is 12.5 microns, and the horizontal resolution is controlled by the scan speed and scan length. There is a horizontal broading factor which is a function of stylus radius and of step height. This broading factor is added to the horizontal dimensions of the steps. The stylus tracking force is factory-set to 50 milligrams.
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Usage Policy
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Contact
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Email |
Bohzi Yang |
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Qualified Users List
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etc. |
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Standard Operating Procedures
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Application Notes
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Useful Links
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Miscellaneous
Contact information for sales & service are:
Terry Manning Veeco Metrology 2650 E. Elvira Road Tucson,AZ 85706
(520)741-1044x1175 tmanning@veeco.com
and
Jim Pohnan Byron Ellis Associates 440-826-0559
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