CMU MEMS Laboratory Publication Abstract


in Technical Digest of the Solid-State Sensor, Actuator and Microsystems Workshop (Hilton Head), June 6-10, 2004, Hilton Head Island, SC, USA.
Electrothermal SCS Micromirror with Large-Vertical-Displacement Actuation
A. Jain, H. Qu, S. Todd, G. Fedder and H. Xie
This paper reports a novel large-vertical-displacement (LVD) microactuator that can generate large piston motion at low driving voltage. A LVD micromirror device has been fabricated by using a unique DRIE CMOS-MEMS process that can simultaneously provide thin-film and single-crystal silicon microstructures. With only a 0.7 mm by 0.32 mm sized device, the LVD micromirror demonstrated a vertical displacement of 0.2 mm at an actuation voltage of 6 V d.c. This device can also perform bidirectional rotational scanning through the use of two bimorph actuators. The micromirror can rotate ± 20°, and has negligible initial tilt angle and high scanning speeds (~2 kHz).
© 2004 Transducers Research Foundation. All Rights Reserved.
Full paper (PDF) (opens in new window).

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