Parameterized Cells ( Pcell ) are a powerful tool to create Cadence layout designs. This Tutorial gives step by step instructions of how to create a Pcell for comb drive fingers and how to instantiate this finger Pcell to create a comb drive. Then, we will also use this Pcell to create a mesh for metal membrane designs. This tutorial assume you have set up and started Cadence properly. This tutorial is process independent. However if you choose to skip steps, pre-created tutorial Pcells exists in hp_cds (MOSIS HP 0.5um process).
1. How to Create a "pcell_demo" Pcell
Part I. Initialize Pcell environment
Part II. Draw basic geometry
Part III. Define parameters
Part IV. Compile Pcell
2. How to Instantiate "pcell_demo" Pcell
3. Create a Mesh layout with "pcell_demo" Pcell
Part I. Create "basic_unit" layout with "pcell_demo"
Part II. Create "2by2_unit" layout with "basic_unit"
Part III. Create "test_mesh" layout with "2by2_unit"
All above Pcell/layout cells are available in demo library in
hp_cds (for MOSIS HP 0.5 um process). For help with using hp_cds, click
here.
The demo library Includes:
pcell_demo (fingers)
basic_unit (fingers as a comb)
2by2_unit (2 by 2 comb as minimal mesh)
test_mesh (instantiation example)
Created September 18, 2001 by Kai He at khe@ece.cmu.edu