Guide to using SKILL to create Pcells in CADENCE

Here is an easy way to do it.


Example SKILL files

frame.skl
Makes a parametrized frame that you can suspend in your CMOS design to relieve curl-inducing stress. You can adjust the beam widths, spacings, and internal length and width. The pcell automatically adjusts the spacing to get a nice integral number of subsections.
fingers.skl
Makes parametrized fingers, e.g. stator/rotor pairs. You can change the finger length, width, gap and number.
honey.skl
Makes a parametrized honey-comb shape. You can adjust the cell size and wall width.
serpent.skl
Makes a parametrized serpentine spring. You can adjust all the parameters as given in Dr. Fedder's dissertation. I also have a Maple worksheet that takes Fedder's formulae for the spring constants and evaluates them, as well as attempts to estimate the effective mass of such springs in a flexture system.



For questions or comments regarding these pages contact :
John Neumann
jneumann@ece.cmu.edu
last updated February 26, 1999