MEMS Design Help Pages

Cadence Help Pages (for MEMS Design)

Part I. How to use Cadence for your MEMS design

There are 3 options for designing and fabricating your MEMS device

MUMPS

CMOS-MEMS (HP or AMS)

Develop your own process

These pages are designed to help members of the MEMS group to get started in using one of the foundry based fabrication capabilities. Please choose one of the below three technologies that you need to work on.

Mumps

CMOS (HP)

CMOS (AMS)

Part II. How to submit your design for fabrication

Once you are done with your design, you need to submit the design to fabrication.

MUMPS Submissions

MOSIS Submissions

MOSIS official fabrication schedule

List of MOSIS CMOS-MEMS runs

AMS sensors1 wafers

Part III. How to release your chip

Once it is fabricated, you need to release and test your device.

Releasing processures and steps

Microfabrication Chemistry Laboratory
Getting access to equipments, standard operating procedures for certain equipments, as well as numerous safety links

Advanced Topics:

HOW TO confidently cif in and cif out
HOW TO plot
A Guide to using SKILL to make Pcells do what you want.
If the Virtuoso editor won't let you put the features you want in your Pcell, read this. It will help you master the basics and do things you couldn't do with the graphical editor. Example SKILL files.
Updated 02/26/99
CMU ECE Cadence FAQ
How to Check your Layout before submission (A compendium of errors to avoid.)
Cadence Units convention (i.e., "microns or lambda?" or "Why doesn't the DRC work?")

Return to Internal CMU MEMS Home Page

Revised: 4/26/00 by khe@ece.cmu.edu