These pages are now quite outdated, but are left active as they are still an excellent starting point for many users.
There are 3 options for designing and
fabricating your MEMS device
MUMPS
CMOS-MEMS (Although only HP
or AMS information is listed in these pages, much of the information maps to the active processes we now use.)
Develop your own process
These pages are designed to help
members of the MEMS group to get started in using one of the foundry based fabrication
capabilities. Please choose one of the below three technologies that you need to work on.
Part II. How to submit your design for fabrication
Once you are done with your design, you need to submit the design to fabrication.
Part III. How to release your chip
Once it is fabricated, you need to release
and test your device.
Advanced Topics:
Return to Internal CMU MEMS Home Page
Getting access to equipments, standard operating procedures for certain equipments, as
well as numerous safety links
If the Virtuoso editor won't let you put the features you want in your Pcell, read this.
It will help you master the basics and do things you couldn't do with the graphical
editor. Example SKILL files.
Updated 02/26/99