Layout Generation

1. In the schematic window, press F6. Notice there is a new menu item MEMS Utilities appears on the top menu bar.
2. Click MEMS Utilities. You will see three sub menu-items.



3. Click on Check & Save for MEMS Schematics. In the CIW window you should see that there were no errors and that new Values of Xc and Yc have been set.

5. Click on Schematics => Layout. The generated layout will automatically popup in a seperate window.

Note that when you first see the layout you will only see the top level cells. To see the detailed layers, as in the figure below, press "SHIFT + F". To switch back press "CTRL + F".

Created 03/09/00 by khe@ece.cmu.edu