3D Simulation

Part I . Generate mesh file. 

1. In the layout window(virtuoso editor)press F7 to bring up the MEMS menu function.

2. Click on Layout -> Mesh. A Layout->Mesh Parameter Window will pop up.
   
   Input the desired L/W ratio and output filename. In this example, we set L/W ratio = 1 and ouput filename = "try".
3. Click OK. Watch the CIW window. After Cadence runs for a while it will indicate that the output file generation is complete.
   
   
   The mesh file "try.unv" has been generated in your working directory.

Part II . Visualization in Memcad. 

1. Set up Memcad4.6 if you have not already done so. Click here for instructions on how to set up Memcad4.6.
2. In your Unix console window, start Memcad by typing
       Memcad4 &
3. A Memcad Main window will appear.
   
4. Click on Device Creation. A Device Creation Window will appear.
   
5. Click the model button at the lower left corner, a Model window will appear.
   
   Fill in the path of the mesh.unv file we just created. Also fill in the locations and filenames of *.mf1 and *.mbif files that Memcad is going to create.
6. In the Device Creation Window click Convert Model. Sit back and wait, the example takes about 20 minuites and 5Mb of afs space. When the conversion is done, a window will pop up.
   
7. Click Continue.
8. Now in the Device Creation Window, click Model Setup. Two windows will appear.
   
   
9. In the Visualizer Control Panel window, click Start Visualizer. The Visualizer window will appear.
   
10. Now you can drag the viewer or click on the top viewer buttons to select different views. Have fun!

Updated March 25, 2000 by Kai He at khe@ece.cmu.edu