Jan 28, 2000
Copyright (c) 1998, Carnegie Mellon University
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Fig. 1 Layout
Part I. Presteps 1. Start Cadence 2. Read schematic edit help to learn how to: A. Create a new library B. Create a new schematic cell view C. Placing an instance in a schematic editing window D. Some basic skills in manipulating the symbols E. List of required parameters for CMU Mems Utility components. 3. The schematic design of this tutorial can be found at: In the Library Manager, click "demo" in Library column, then click "resonator" in Cell column, then double click "schematic". 4. Create a new library "test". Create a new schematic in "test" library. Follow the steps to learn how to create a schematic like the one in the demo library. Feel free to refer to the demo as you go to compare with your own. Part II. Steps to build a folded flexure resonator 1. lets start with the five "plate" instances. Place them vertically with certain distance in between. The middle one is the center shuttle; the second and fourth ones are the shuttle yoke; and the first one and fifth one are the mass of the combdrive. Connect them respectively. Edit properties: plate 1&5 plate 2&4 plate 3 unitl 5.5u 8.5u 26u unitw 106u 48u 13u unitnum_x 1 1 1 unitnum_y 1 1 1 percentage_holes 0 0 0 joint_offset 0u 3.5u 0u angle 0 0 0 2. Practice looking up properties in the demo schematic instances by selecting an instance then clicking the middle mouse button and selecting "Properties..." from the pop-up menu. 3. Now place the beams. There are 6 horizontal beams and 8 vertical beams. Note you can rotate a beam by selecting the beam, clicking the middle mouse button and selecting "Rotate" form the pop-up menu. Enter all the necessary Properties. (try looking up the properties from the demo schematic) 4. Now place the comb drives. Note that the top one is "comb_1" and bottom one is "comb_2". The default comb drive is horizontal, so you have to rotate them. Comb drives have a lot of properties, be careful not to miss any! 5. Now place the anchors. Note that the anchor symbol can be rotated and flipped, but you have to keep in mind that the "x" pins always connect to the "x" pins, and the "y" pins always connect to the "y" pins. You may see some demo connections that look very awkward because I don't flip anchors. Just my personal habit. Anchor has "length" and "width" properties. 6. Now the electronic parts. Note that all the mechanical parts are from "NODAS_poly" library, but all the electronic parts are from "analogLib" library. 7. Place the the "layout_origin". Unlike the beams symbols that corresponds to physical parts on the silicon surface, this symbol doesn't have any physical counterpart. It is just an indication of the layout coordinate origin. This is the only symbol that does not have any property. 8. Check all your mechanical and electrical connections and save your file. A complete folded flexure resonator has been completed. Part III. Layout Generation Now that we've done all the hard work, layout generation is just a few clicks away. 1. In the schematic window, press F6. Notice there is a new menu item "Mems Utility" that appears on the top menu bar. 2. Click "Mems Utility". You will see three sub menu-items. 3. Click on "Check & Save for MEMS Schematics". A window will pop saying "There were 0 errors and XXX warnings". Close it by clicking "Close". 4. Click on "XC:YC for MEMS Schematics". You should see "New Values of XC, YC has been set" in CIW window. 5. Click on "Schematics => Layout". Part IV. Simulation and Analysis 1. After you saved your file, in the Schematic window click on "Tools" => "Artist". An Analog Artist Simulation window will appear. 2. Now we have to select the node we want to plot. In the Analog Artist Simulation Window, click on "Outputs" => "To Be Plotted => "Select On Schematic". Then in Schematic Window click on the electronic output net of the resonator. The net becomes high-lighted with color. (in the case yellow) 3. Now we are going to do an AC analysis to find out the resonate frequency. In the Analog Artist Simulation window, click "Analysis" => "Choose". A Choose Analysis window will appear. Select "ac", and set the frequency range as above. Then click "Ok". 4. In the Analog Artist Simulation window, click on "Simulation" => "Run". After Cadence finishes calculating a waveform window will appear. You can see that the resonate frequency is around 30k. If you got this far, congratulations! Your romantic journey with Cadence kicked off pretty well!
Created 01/28/00 by khe@ece.cmu.edu