Laurel Technologies WS-400-6NPP-LITE Spinner
Description
... to top
Usage Policy
... to top
Contact
Name |
Office |
Extension |
Email |
|
|
|
|
... to top
Qualified Users List
Name |
Office |
Extension |
Email |
|
|
|
|
|
|
|
|
etc. |
|
|
|
... to top
Standard Operating Procedures
- Turn on spinner. This will allow you to see the display and what the current settings are.
- There are multiple programs that can be setup.
In the upper right-hand corner of the display is a letter from A-J (I think),
this is the program that you are using.
- You can add as many steps as you need.
I am not sure what the max is.
- To setup a new program with 2 steps for example: 6 sec @ 600rpm / 30sec @ 4000 rpm
- Press F1 (this will automatically put you in the setup phase for step 1)
- Move the cursor to the seconds or minutes position on the display using the “cursor” buttons.
- Change the time to 6 sec by using the value buttons.
- Move the cursor to the rpm position on the display by using the “cursor” buttons.
- Change the rpm to 600 by using the value buttons.
- Press the “Add Step” button. It should show step 2/2 on the display.
- Move the cursor to the seconds or minutes position on the display using the “cursor” buttons.
- Change the time to 30 sec by using the value buttons.
- Move the cursor to the rpm position on the display by using the “cursor” buttons.
- Change the rpm to 4000 by using the value buttons.
- Press F1
- Open lid and center your wafer on the stage.
- Close lid and press the “vacuum” button
- Add your HMDS, Photo-resist, or whatever you’re spinning onto the wafer through the hole in the lid.
- Press “Run / Stop” button to run program.
- You can also edit an existing program by basically pressing the
“Program Select” button until you find a program that has the
same number of steps that you need to run and pressing the “F1” button;
and follow the same steps above except after step “e”, if you are editing
a program that already has a second step in the program, just press the
“step” button to take you to it.
- If you need to delete a step, go to that step and press the “Delete Step” button.
... to top
Application Notes
... to top
Useful Links
... to top
Miscellaneous
... to top
|